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Semiconductor & Microelectronics

In the semiconductor industry numerous processes need ultra pure water and gases for their operation. Any disturbance in gas quality may lead to a cost intensive plant shut down - this should be avoided. Therefore, continuous and fast gas analysis is required to meet the high quality standards set.

Gas is used or is prepared under particularly strin-gent specifications. It is a matter of ensuring purity in respect of all types of contaminants: organic/inorganic compounds, dissolved/solid or volatile/non-volatile components, dissolved gases, reactive/inert substances etc.

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